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Functional Micro- and Nanosystems Rutilius Taurus Aemilianus (WiedmaierThe 4th caesarium brought together world known experts reporting the state of the art of Functional Micro and Nanosystems. Its purpose was to identify and open up new research directions in this rapidly evolving new area and to discuss the potential with respect to applications in automotive, biochemical and information technology. Thin film technologies are an attractive approach to incorporate functional properties into micro or nano systems. The
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